DocumentCode :
2783589
Title :
Time Dependent Vccmin Degradation of SRAM Fabricated with High-k Gate Dielectrics
Author :
Lin, J.C. ; Oates, A.S. ; Yu, C.H.
Author_Institution :
Taiwan Semicond. Manuf. Co. Ltd., Hsinchu
fYear :
2007
fDate :
15-19 April 2007
Firstpage :
439
Lastpage :
444
Abstract :
The paper presents the results of simulations of voltage-induced V ccmin drift of SRAMs fabricated with high-k gate dielectrics. The authors show that high-k based SRAMs are fundamentally more susceptible to Vccmin stability problems because PMOS NBTI and NMOS PBTI lead to an additive degradation in the bit-cell read voltage. Given the differing time dependences of the NBTI and PBTI phenomena, the drift of Vccmin is enhanced at much earlier times compared to SRAMs that have SiO2 gate dielectric only devices. Maintaining Vccmin stability presents a significantly greater challenge for high-k gate dielectrics compared to SiO2
Keywords :
MOS integrated circuits; SRAM chips; high-k dielectric thin films; integrated circuit reliability; silicon compounds; stability; NMOS PBTI; PMOS NBTI; SRAM; SiO2; high-k gate dielectrics; stability problems; time dependent degradation; voltage-induced drift; Degradation; High K dielectric materials; High-K gate dielectrics; Lead; MOS devices; Niobium compounds; Random access memory; Stability; Titanium compounds; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability physics symposium, 2007. proceedings. 45th annual. ieee international
Conference_Location :
Phoenix, AZ
Print_ISBN :
1-4244-0919-5
Electronic_ISBN :
1-4244-0919-5
Type :
conf
DOI :
10.1109/RELPHY.2007.369930
Filename :
4227671
Link To Document :
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