DocumentCode :
2783898
Title :
Investigation of Laser Voltage Probing Signals in CMOS Transistors
Author :
Kindereit, Ulrike ; Woods, Gary ; Tian, Jing ; Kerst, Uwe ; Boit, Christian
Author_Institution :
Berlin Univ. of Technol.
fYear :
2007
fDate :
15-19 April 2007
Firstpage :
526
Lastpage :
533
Abstract :
The increasing number of interconnection layers is making failure analysis of integrated circuits (ICs) increasingly complex. In addition, the decreasing supply voltage is a challenge for failure analysis equipment, as minimum detection levels are reached. Laser voltage probing (LVP) is a common method for probing internal nodes through the silicon back side, and is particularly suited to low-voltage measurements. However, to date there has been little work on detailed understanding of the physical origin of LVP signals. This article presents measurements of LVP signal strength on large test structures over a wide range of parameters as a first approach to detailed understanding of LVP physics and future scaling. All the measurements we present were performed using a continuous-wave 1319 nm laser. In addition to the usual time-domain LVP measurements, the authors demonstrate rapid data acquisition scheme using frequency-domain measurements. This method allows rapid voltage sweeps and also allows for (x, y) mapping of signal strength across device structures. The signal strengths are in accord with qualitative models.
Keywords :
CMOS integrated circuits; MOSFET; failure analysis; lasers; 1319 nm; CMOS transistors; LVP signal strength; continuous-wave laser; failure analysis; frequency-domain measurements; interconnection layers; laser voltage probing signals; low-voltage measurements; Failure analysis; Frequency measurement; Integrated circuit interconnections; Integrated circuit measurements; Laser theory; Particle measurements; Physics; Silicon; Testing; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability physics symposium, 2007. proceedings. 45th annual. ieee international
Conference_Location :
Phoenix, AZ
Print_ISBN :
1-4244-0919-5
Electronic_ISBN :
1-4244-0919-5
Type :
conf
DOI :
10.1109/RELPHY.2007.369946
Filename :
4227687
Link To Document :
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