Adaptive control for piezo-actuated XY-table

Author

Chen, Xinkai ; Hattori, Makoto

Author_Institution

Dept. of Electron. & Infornation Syst., Shibaura Inst. of Technol., Saitama, Japan

fYear

2011

fDate

7-10 Aug. 2011

Firstpage

2089

Lastpage

2094

Abstract

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Keywords

adaptive control; control nonlinearities; piezoelectric actuators; position control; stability; Prandtl-Ishlinskii model; adaptive control; global stability; hysteretic nonlinearity; piezo actuated XY-table; piezo electric actuators; positioning mechanism; Actuators; Adaptation models; Adaptive control; Force; Hysteresis; Mathematical model; Stability analysis; XY-table; high precision control; hysteresis; piezo electric actuators;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics and Automation (ICMA), 2011 International Conference on

Conference_Location

Beijing

ISSN

2152-7431

Print_ISBN

978-1-4244-8113-2

Type

conf

DOI

10.1109/ICMA.2011.5986303

Filename

5986303