Title :
Adaptive control for piezo-actuated XY-table
Author :
Chen, Xinkai ; Hattori, Makoto
Author_Institution :
Dept. of Electron. & Infornation Syst., Shibaura Inst. of Technol., Saitama, Japan
Abstract :
The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
Keywords :
adaptive control; control nonlinearities; piezoelectric actuators; position control; stability; Prandtl-Ishlinskii model; adaptive control; global stability; hysteretic nonlinearity; piezo actuated XY-table; piezo electric actuators; positioning mechanism; Actuators; Adaptation models; Adaptive control; Force; Hysteresis; Mathematical model; Stability analysis; XY-table; high precision control; hysteresis; piezo electric actuators;
Conference_Titel :
Mechatronics and Automation (ICMA), 2011 International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-8113-2
DOI :
10.1109/ICMA.2011.5986303