Title :
Thermal diffusion control of femtosecond laser generated modifications of nanoscale pulsed-laser deposited diamond-like carbon films
Author :
Forster, M. ; Egerhazi, L. ; Haselberger, C. ; Hube, C. ; Szörényi, T. ; Kautek, W.
Author_Institution :
Dept. of Phys. Chem., Univ. of Vienna, Vienna, Austria
Abstract :
Single 60-femtosecond laser pulse modification threshold fluences (Phith) of nanometer-thin diamond-like carbon (DLC) films generated by inverse pulse laser deposition (IPLD) show strong dependencies on the film thickness l. Experiments were performed in an ultrahigh precision microscope setup with a high numerical aperture objective (NA = 0.7).
Keywords :
diamond-like carbon; high-speed optical techniques; laser materials processing; pulsed laser deposition; thermal diffusion; femtosecond laser pulse modification threshold fluences; inverse pulse laser deposition; nanometer-thin diamond-like carbon films; nanoscale pulsed-laser deposited diamond-like carbon films; thermal diffusion control; Chemical lasers; Diamond-like carbon; Electrons; Laser ablation; Laser theory; Nickel; Optical control; Optical pulse generation; Pulsed laser deposition; Silicon;
Conference_Titel :
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-4079-5
Electronic_ISBN :
978-1-4244-4080-1
DOI :
10.1109/CLEOE-EQEC.2009.5191984