Title :
Preparation of polyimide films by vapor deposition polymerization and their photocurrents
Author :
Iida, Kazuo ; Nohara, Tsukasa ; Nakamura, Shuhei ; Ieda, Mirai ; Sawa, Goro
Author_Institution :
Mie University
Keywords :
Chemical vapor deposition; Fabrication; Infrared heating; Infrared spectra; Monitoring; Photoconductivity; Polyimides; Polymer films; Substrates; Temperature;
Conference_Titel :
Electrical Insulating Materials, 1988. Proceedings of the Twenty-First Symposium on
Print_ISBN :
4-88686-041-9
DOI :
10.1109/ISEIM.1988.763480
