• DocumentCode
    2784449
  • Title

    High-field conduction and breakdown strength in poly-p-xylylene thin film

  • Author

    Mori, Tatuo ; Takai, Yoshiaki ; Mizutani, Teruyoshi ; Ieda, Masayuki

  • Author_Institution
    Nagoya University
  • fYear
    1988
  • fDate
    1988
  • Firstpage
    231
  • Lastpage
    234
  • Keywords
    Breakdown voltage; Dielectric losses; Dielectric thin films; Electric breakdown; Ionization; Plasma measurements; Plasma temperature; Polymer films; Temperature dependence; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Insulating Materials, 1988. Proceedings of the Twenty-First Symposium on
  • Print_ISBN
    4-88686-041-9
  • Type

    conf

  • DOI
    10.1109/ISEIM.1988.763481
  • Filename
    763481