• DocumentCode
    2784459
  • Title

    Electrical properties of TiO2 thin film prepared by sol-gel method

  • Author

    Sato, Shigeki ; Taguchi, Haruo ; Yoshimura, Naoko

  • Author_Institution
    Akita University
  • fYear
    1988
  • fDate
    1988
  • Firstpage
    235
  • Lastpage
    238
  • Keywords
    Conductivity; Crystallization; Electric variables measurement; Fluid flow measurement; Power measurement; Semiconductor films; Semiconductor thin films; Substrates; Temperature; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Insulating Materials, 1988. Proceedings of the Twenty-First Symposium on
  • Print_ISBN
    4-88686-041-9
  • Type

    conf

  • DOI
    10.1109/ISEIM.1988.763482
  • Filename
    763482
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2784459