DocumentCode
2784787
Title
Silicon VLSI Technology Trends
Author
Ning, Tak H.
Author_Institution
IBM Research Division
fYear
1992
fDate
28-30 Sep 1992
Firstpage
336
Lastpage
338
Keywords
CMOS technology; Capacitors; Chemical technology; Circuits; Lithography; Logic devices; Planarization; Random access memory; Silicon; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International
Print_ISBN
0-7803-0755-0
Type
conf
DOI
10.1109/IEMT.1992.639915
Filename
639915
Link To Document