Title :
In-situ pulse characterization for silicon micromachining
Author :
Zhu, Xin ; Gunaratne, Tissa C. ; Dantus, Marcos
Author_Institution :
Department of Chemistry and Department of Physics, Michigan State University, E. Lansing, 48824, USA
Abstract :
Femtosecond pulse characterization and adaptive pulse compression is demonstrated using surface second harmonic generation from a silicon wafer using multiphoton intrapulse interference phase scan (MIIPS).
Keywords :
Micromachining; Nonlinear optics; Optical harmonic generation; Optical pulse generation; Optical pulse shaping; Pulse amplifiers; Pulse compression methods; Pulse shaping methods; Silicon; Ultrafast optics;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431171
