DocumentCode
2784934
Title
In-situ pulse characterization for silicon micromachining
Author
Zhu, Xin ; Gunaratne, Tissa C. ; Dantus, Marcos
Author_Institution
Department of Chemistry and Department of Physics, Michigan State University, E. Lansing, 48824, USA
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
Femtosecond pulse characterization and adaptive pulse compression is demonstrated using surface second harmonic generation from a silicon wafer using multiphoton intrapulse interference phase scan (MIIPS).
Keywords
Micromachining; Nonlinear optics; Optical harmonic generation; Optical pulse generation; Optical pulse shaping; Pulse amplifiers; Pulse compression methods; Pulse shaping methods; Silicon; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location
Baltimore, MD, USA
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/QELS.2007.4431171
Filename
4431171
Link To Document