Title :
Temperature dependence of ultrafast laser ablation efficiency of crystalline silicon
Author :
Yahng, J.S. ; Jeoung, S.C.
Author_Institution :
Division of Advanced Technology, Korea Research Institute of Standards and Science, Daejeon 305-340, Korea
Abstract :
Ultrafast laser ablation of crystalline silicon was investigated as a function of temperature. The ablation efficiency is slightly enhanced with an apparent decrease in ablation threshold and surface roughness at a high substrate temperature.
Keywords :
Crystallization; Laser ablation; Optical surface waves; Pulsed laser deposition; Rough surfaces; Silicon; Surface emitting lasers; Surface morphology; Temperature dependence; Ultrafast optics;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431172
