Title :
Toward 3D microfluidic structures fabricated with two-photon laser machining
Author :
Liu, Yihong ; Pyrak-Nolte, Laura J. ; Nolte, David
Author_Institution :
Department of Physics, Purdue University, West Lafayette, IN 47907, USA
Abstract :
We have developed a method to fabricate 31) microfluidic systems with two-photon polymerization in SU-8 photoresist. This approach will be an easy and accurate way to fabricate microfluidic systems simulating complex microstructures.
Keywords :
Bonding; Laser theory; Machining; Microchannel; Microfluidics; Microstructure; Optical device fabrication; Polymers; Resists; Ultrafast optics;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431178
