DocumentCode :
2785162
Title :
Unified Perspective of NBTI and Hot-Carrier Degradation in CMOS using on-the-Fly Bias Patterns
Author :
Parthasarathy, C.R. ; Denais, M. ; Huard, V. ; Guerin, C. ; Ribes, G. ; Vincent, E. ; Bravaix, A.
Author_Institution :
STMicroelectronics, Crolles
fYear :
2007
fDate :
15-19 April 2007
Firstpage :
696
Lastpage :
697
Abstract :
This work views NBTI and various conditions of channel hot carrier (CHC) degradation in PMOS and NMOS devices from a unified perspective. This is accomplished by a novel technique using sequential application of stress biases and monitoring the degradation on-the-fly. Thereby, we are able to observe and segregate the distinct mechanisms co-existing during a particular condition of degradation. In particular, we gain critical insights into recovery phenomena, which are observed during certain conditions of CHC degradation (Mistry et al., 1991) as well as during NBTI (Rangan, 2003). These findings set the stage for consistent physical models for degradation as well as for design simulation under multiple operating modes
Keywords :
MOSFET; hot carriers; semiconductor device reliability; CMOS; NBTI; NMOS devices; PMOS device; degradation monitoring; design simulation; hot-carrier degradation; on-the-fly bias patterns; physical models; recovery phenomena; sequential stress biases application; CMOS technology; Chromium; Degradation; Hot carriers; Lead compounds; MOS devices; Niobium compounds; Stress; Temperature; Titanium compounds;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability physics symposium, 2007. proceedings. 45th annual. ieee international
Conference_Location :
Phoenix, AZ
Print_ISBN :
1-4244-0919-5
Electronic_ISBN :
1-4244-0919-5
Type :
conf
DOI :
10.1109/RELPHY.2007.369575
Filename :
4227759
Link To Document :
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