Title :
A CMOS Sensor for Nano-Imaging
Author :
Li, Shengdong ; Kleinfelder, Stuart ; Jin, Liang ; Xuong, Nguyen H.
Author_Institution :
Dept. of Electrical Engineering and Computer Science, University of California, Irvine, CA
Abstract :
We report on the design and measurements of a new direct electron imaging sensor. The active pixel sensor array consists of 512 by 550 pixels, each 5 by 5 μm in size, with a ∼8 μm epitaxial layer, to achieve an effective fill factor of 100%. Spatial resolution of 2.3 μm for a single incident e-has been measured. Tests have been performed with 200 and 300 keV beams, and an image of a catalase crystal, taken with the sensor, is presented. This novel sensor technology opens the door for studies of nanostructures and biological samples at higher resolution in both space and time.
Keywords :
Actve Pixel Sensor; Direct Electron Imaging Sensor; Proteins; TEM; Viruses; Biosensors; CMOS image sensors; Electrons; Epitaxial layers; Image sensors; Nanobioscience; Sensor arrays; Space technology; Spatial resolution; Testing; Actve Pixel Sensor; Direct Electron Imaging Sensor; Proteins; TEM; Viruses;
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
DOI :
10.1109/NANO.2006.247709
