Title :
Optimization of the SAW gas sensor with two-port resonantor
Author :
Li, Kun ; Du, Xiao-song ; Hu, Jia ; Sun, Ping ; Jiang, Ya-dong
Author_Institution :
State Key Lab. of Electron. Thin Film & Integrated Devices, Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
The frequency response and the sensitive mechanics of the ST cut quartz SAW sensor with two-port resonator and FPOL sensitive film are theoretically analyzed. The factors affecting the frequency response and the detective sensitivity are systematically researched with the P-matrix method. The results show that, it is necessary to properly choose the width, the thickness and the material parameters of the sensitive film in addition to the optimization of the device structure, in order to improve the detective sensitivity and to reduce the insert loss. The optimized device structure and sensitive film parameters are given in this article, which can provide important reference in designing and analyzing the two-port resonance SAW sensor.
Keywords :
frequency response; gas sensors; matrix algebra; quartz; resonators; surface acoustic wave sensors; two-port networks; FPOL sensitive film; P-matrix method; SAW gas sensor; ST cut quartz SAW sensor; detective sensitivity; device structure optimization; frequency response; surface acoustic wave sensor; two-port resonator; Acoustic sensors; Acoustic signal detection; Chemical sensors; Frequency response; Gas detectors; Polymer films; Resonance; Surface acoustic wave devices; Surface acoustic waves; Thin film sensors; FPOL sensitive film; P-matrix; surface acoustic wave sensor; two-port resonator;
Conference_Titel :
Apperceiving Computing and Intelligence Analysis, 2009. ICACIA 2009. International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4244-5204-0
Electronic_ISBN :
978-1-4244-5206-4
DOI :
10.1109/ICACIA.2009.5361123
