DocumentCode :
2785732
Title :
Characterize the Thermal Properties of the Vertical Aligned Carbon Nanotubes Array Used for IC Cooling with Photothermal Method
Author :
Zhang, Yi ; Xu, Yuan ; Wang, Xinwei
Author_Institution :
Nanoconduction Inc. 1244 Reamwood Ave, Sunnyvale CA 94086
Volume :
2
fYear :
2006
fDate :
17-20 June 2006
Firstpage :
640
Lastpage :
643
Abstract :
Carbon Nanotubes show great potential to be used as an interface material for heat transport in IC cooling due to their high thermal conductivity. In this work, we developed a novel photothermal metrology to characterize the thermal properties of vertically aligned carbon nanotubes array (V-CNTA), which is grown directly on silicon/copper substrate with plasma-enhanced chemical vapor deposition (PECVD). The thermal conductivity of the V-CNTA and the thermal interface contact resistance are measured and correlated with theoretical calculation. The total thermal resistance of V-CNTA is measured to be 0.12 cm2. K/W with a pressure of 60 psi and decreases with increasing the applied pressure. It demonstrated the capability of using V-CNTA for IC cooling. The total thermal resistance of the thermal grease is also measured for comparison.
Keywords :
Carbon nanotube; IC-cooling; photothermal; Carbon nanotubes; Conducting materials; Cooling; Electrical resistance measurement; Metrology; Organic materials; Plasma measurements; Plasma properties; Thermal conductivity; Thermal resistance; Carbon nanotube; IC-cooling; photothermal;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
Type :
conf
DOI :
10.1109/NANO.2006.247735
Filename :
1717185
Link To Document :
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