Prospects of the automation for ULSI manufacturing

Author

Aoki, Toshiaki

Author_Institution

Mitsubishi Electr. Corp., Hyogo, Japan

fYear

1990

fDate

1-3 Oct 1990

Firstpage

19

Lastpage

22

Abstract

The present condition of semiconductor wafer manufacturing line automation and future prospects are described. The wafer manufacturing line includes direct operations such as the setting of processing parameters for the equipment, the inspection of the products, and the transport of wafers between equipment. It also includes indirect operations such as production control, quality control, and equipment control which maintain the manufacturing line´s operation. It is shown that these operations can be subject to automation. Automated processing, automated transport, and automated line control are considered

Keywords

VLSI; computerised materials handling; integrated circuit manufacture; manufacturing computer control; production control; quality control; ULSI manufacturing; automated line control; automated transport; equipment control; factory automation; inspection; line automation; processing parameters; production control; quality control; semiconductor wafer manufacturing; wafer transport; Automatic control; Computer aided manufacturing; Manufacturing automation; Manufacturing processes; Production control; Quality control; Quality management; Robotics and automation; Semiconductor device manufacture; Ultra large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Manufacturing Technology Symposium, 1990 Proceedings, Competitive Manufacturing for the Next Decade. IEMT Symposium, Ninth IEEE/CHMT International

Conference_Location

Washington, DC

Type

conf

DOI

10.1109/IEMT9.1990.114973

Filename

114973