Title :
Development of CNT Based Sensor Array on a MUMPs Chip
Author :
Lai, King W C ; Xi, Ning ; Li, Wen J. ; Kwong, C.P.
Author_Institution :
The Robotics and Automation Laboratory, Michigan State University, East Lansing, M. I., kinglai@egr.msu.edu
Abstract :
A 10 × 10 Carbon Nanotube (CNT) based sensor array is under development on a micro chip. By using dielectrophoretic technique, multi-walled carbon nanotubes (MWNT) bundles were successfully and repeatedly manipulated between an array of fabricated microelectrodes. Experimental results showed that the sensors could be operated in, μW range. It means their power dissipation is much smaller than conventional polysilicon sensors. In addition, microspotting is employed to realize this nanodevice manufacturing of CNT based sensors and increase the yield of the process. This feasible batch manufacturable method will dramatically reduce production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT based devices.
Keywords :
CNT sensors; DEP manipulation; micro-robotic spotting; nano batch fabrication; nano manufacturing; Assembly; Carbon nanotubes; Costs; Dielectrophoresis; Manufacturing automation; Manufacturing processes; Microelectrodes; Power dissipation; Production; Sensor arrays; CNT sensors; DEP manipulation; micro-robotic spotting; nano batch fabrication; nano manufacturing;
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
DOI :
10.1109/NANO.2006.247779
