Title :
The equipment improvement program: a structured methodology for continuous improvement and increased equipment life
Author :
Kanagal, Ashok ; Ranadive, Deepak
Author_Institution :
SEMATECH, Austin, TX, USA
Abstract :
The equipment improvement program, a SEMATECH initiative to help improve the US semiconductor industry´s efficient use of capital equipment, is described. This program focuses on continuous performance improvement of existing equipment to meet current and future manufacturing requirements with the goal of extending their useful life by a generation. Working hand-in-hand with suppliers, these programs are aimed at improving equipment reliability, throughput, and yield, thereby decreasing process step costs. Issues related to the industry´s growth, strategic direction, cost of capital, and capital productivity are explored
Keywords :
economics; electronics industry; integrated circuit manufacture; reliability; semiconductor device manufacture; SEMATECH initiative; US semiconductor industry; capital cost; capital productivity; continuous performance; equipment improvement program; equipment life; equipment reliability; structured methodology; throughput improvement; yield improvement; Continuous improvement; Costs; Electronics industry; Fasteners; Geometry; Manufacturing automation; Manufacturing industries; Semiconductor device manufacture; Technological innovation; Throughput;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1990 Proceedings, Competitive Manufacturing for the Next Decade. IEMT Symposium, Ninth IEEE/CHMT International
Conference_Location :
Washington, DC
DOI :
10.1109/IEMT9.1990.114975
