DocumentCode
2786978
Title
Design of a 6DOF Stewart-type Nanoscale Platform
Author
Ting, Yung ; Jar, Ho-Chin ; Li, Chun-Chung
Author_Institution
Department of Mechanical Engineering, Chung Yuan Christian University, Taiwan, R.O.C., yung@cycu.edu.tw
Volume
2
fYear
2006
fDate
17-20 June 2006
Firstpage
909
Lastpage
912
Abstract
In this article, a cost-effective 6DOF Stewart-type platform driven by piezoelectric actuator is studied. Designs of the flexure hinge mechanism and the error compensation model are useful to deal with the problem due to manufacture error and assembly error. The nonlinear hysteresis effect of the piezoelectric actuator is analyzed by means of the proposed dynamic Preisach model. Its inverse model is used as the feedforward controller. From practical experiment, the designed platform can achieve the objective of nanoscale positioning without the need of sensor-feedback.
Keywords
Stewart platform; error compensartion model; feed-forward controllor; hysteresis effect; Assembly; Error compensation; Fasteners; Hysteresis; Inverse problems; Leg; Nonlinear optics; Optical sensors; Piezoelectric actuators; Voltage; Stewart platform; error compensartion model; feed-forward controllor; hysteresis effect;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN
1-4244-0077-5
Type
conf
DOI
10.1109/NANO.2006.247808
Filename
1717258
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