• DocumentCode
    2786978
  • Title

    Design of a 6DOF Stewart-type Nanoscale Platform

  • Author

    Ting, Yung ; Jar, Ho-Chin ; Li, Chun-Chung

  • Author_Institution
    Department of Mechanical Engineering, Chung Yuan Christian University, Taiwan, R.O.C., yung@cycu.edu.tw
  • Volume
    2
  • fYear
    2006
  • fDate
    17-20 June 2006
  • Firstpage
    909
  • Lastpage
    912
  • Abstract
    In this article, a cost-effective 6DOF Stewart-type platform driven by piezoelectric actuator is studied. Designs of the flexure hinge mechanism and the error compensation model are useful to deal with the problem due to manufacture error and assembly error. The nonlinear hysteresis effect of the piezoelectric actuator is analyzed by means of the proposed dynamic Preisach model. Its inverse model is used as the feedforward controller. From practical experiment, the designed platform can achieve the objective of nanoscale positioning without the need of sensor-feedback.
  • Keywords
    Stewart platform; error compensartion model; feed-forward controllor; hysteresis effect; Assembly; Error compensation; Fasteners; Hysteresis; Inverse problems; Leg; Nonlinear optics; Optical sensors; Piezoelectric actuators; Voltage; Stewart platform; error compensartion model; feed-forward controllor; hysteresis effect;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
  • Print_ISBN
    1-4244-0077-5
  • Type

    conf

  • DOI
    10.1109/NANO.2006.247808
  • Filename
    1717258