Title :
Design of a 6DOF Stewart-type Nanoscale Platform
Author :
Ting, Yung ; Jar, Ho-Chin ; Li, Chun-Chung
Author_Institution :
Department of Mechanical Engineering, Chung Yuan Christian University, Taiwan, R.O.C., yung@cycu.edu.tw
Abstract :
In this article, a cost-effective 6DOF Stewart-type platform driven by piezoelectric actuator is studied. Designs of the flexure hinge mechanism and the error compensation model are useful to deal with the problem due to manufacture error and assembly error. The nonlinear hysteresis effect of the piezoelectric actuator is analyzed by means of the proposed dynamic Preisach model. Its inverse model is used as the feedforward controller. From practical experiment, the designed platform can achieve the objective of nanoscale positioning without the need of sensor-feedback.
Keywords :
Stewart platform; error compensartion model; feed-forward controllor; hysteresis effect; Assembly; Error compensation; Fasteners; Hysteresis; Inverse problems; Leg; Nonlinear optics; Optical sensors; Piezoelectric actuators; Voltage; Stewart platform; error compensartion model; feed-forward controllor; hysteresis effect;
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
DOI :
10.1109/NANO.2006.247808
