Title :
The fabrication of laser array by holographic interference lithography
Author :
Chao, Chuli ; Ni, Chi-Yu ; Xuan, Rong ; Kuo, Hao-Chung
Author_Institution :
Department of Electrophysic, National Chiao Tung University, Hsinchu 300, Taiwan
Abstract :
We have developed a novel method to produce different grating periods in one chip and applied this in the fabrication for laser array. The result shows accurate controllability of lasing wavelength and low threshold currents.
Keywords :
Arrayed waveguide gratings; Fiber lasers; Holography; Interference; Lithography; Optical arrays; Optical device fabrication; Quantum well lasers; Semiconductor laser arrays; Wavelength division multiplexing;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431307
