Title :
Light emission from size reduced nanocrystal silicon quantum dots
Author :
Cheong, Hea-Jeong ; Tanaka, Atsushi ; Hippo, Daihei ; Usami, Kouichi ; Tsuchiya, Yoshishige ; Mizuta, Hiroshi ; Oda, Shunri
Author_Institution :
Quantum NanoElectronics Research Center and Department of Physical Electronics, Tokyo Institute of Technology and SORST-JST, Ookayama, Meguro-ku, 152-8552, JAPAN
Abstract :
We performed HF treatment to silicon quantum dots with diameter of 8nm±1nm fabricated by VHF plasma decomposition process. We observed PL wavelength shift from 750nm to 620nm for 8nm to 2.5nm diameter nc-Si dots.
Keywords :
Argon; Hafnium; Light emitting diodes; Nanocrystals; Oxidation; Photonic band gap; Plasma temperature; Quantum dots; Semiconductor materials; Silicon;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431332
