Title :
Evaluating micromachining capabilities of high power diode pumped solid state mode-locked and q-switched ultraviolet laser
Author :
Patel, Rajesh S. ; Bovatsek, Jim
Author_Institution :
Spectra Physics, USA
Abstract :
The micromachining capabilities of two newly developed DPSS mode-locked and q-switched UV lasers have been evaluated by studying ablation of commonly used materials in semiconductor, microelectronics, and solar cell industry.
Keywords :
Diodes; Laser ablation; Laser excitation; Laser mode locking; Micromachining; Power lasers; Pump lasers; Semiconductor lasers; Solid lasers; Solid state circuits;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431506
