• DocumentCode
    2790177
  • Title

    Evaluating micromachining capabilities of high power diode pumped solid state mode-locked and q-switched ultraviolet laser

  • Author

    Patel, Rajesh S. ; Bovatsek, Jim

  • Author_Institution
    Spectra Physics, USA
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    The micromachining capabilities of two newly developed DPSS mode-locked and q-switched UV lasers have been evaluated by studying ablation of commonly used materials in semiconductor, microelectronics, and solar cell industry.
  • Keywords
    Diodes; Laser ablation; Laser excitation; Laser mode locking; Micromachining; Power lasers; Pump lasers; Semiconductor lasers; Solid lasers; Solid state circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics and Laser Science Conference, 2007. QELS '07
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/QELS.2007.4431506
  • Filename
    4431506
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2790177