Title :
Precision resistor laser trimming for analog microelectronics
Author :
Meunier, Michel ; Gagnon, Yves ; Lacourse, Alain ; Ducharme, Mathieu ; Rioux, Simon ; Savaria, Yvon
Author_Institution :
Ã\x89cole Polytechnique de Montréal, Laser Processing Laboratory, Department of Engineering Physics, PO box 6079, station Centreville, Montreal (Quebec) H3C 3A7, Canada
Abstract :
A fast, low cost laser trimming technique of highly accurate resistor has been developed for analogue microelectronics. Modelling of the technique is described and an example of tuning a reference voltage circuit is given.
Keywords :
Circuits; Laser modes; Laser theory; Laser tuning; Microelectronics; Optical device fabrication; Resistors; Semiconductor lasers; Silicon; Voltage;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/QELS.2007.4431515
