• DocumentCode
    2790339
  • Title

    Asymmetrical M2 in solid state laser beam shaping for the line scanning laser annealing

  • Author

    Darscht, Maxim Ya ; Miklyaev, Yuri V. ; Mikhailov, Alexei V. ; Lissotschenko, Vitalij N.

  • Author_Institution
    LIMO GmbH Bookenburgweg 4-8 44319 Dortmund, Germany
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    A new type of beam shaping system in combination with special characterization of laser parameters provides several mm depth of focus by narrow width and very good homogenization of the line-shaped laser intensity distribution for scanning annealing.
  • Keywords
    Annealing; Glass; Laser beams; Laser sintering; Laser stability; Optical design; Optical films; Optical pulses; Solid lasers; Spatial coherence;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics and Laser Science Conference, 2007. QELS '07
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/QELS.2007.4431516
  • Filename
    4431516