DocumentCode
2790339
Title
Asymmetrical M2 in solid state laser beam shaping for the line scanning laser annealing
Author
Darscht, Maxim Ya ; Miklyaev, Yuri V. ; Mikhailov, Alexei V. ; Lissotschenko, Vitalij N.
Author_Institution
LIMO GmbH Bookenburgweg 4-8 44319 Dortmund, Germany
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
1
Abstract
A new type of beam shaping system in combination with special characterization of laser parameters provides several mm depth of focus by narrow width and very good homogenization of the line-shaped laser intensity distribution for scanning annealing.
Keywords
Annealing; Glass; Laser beams; Laser sintering; Laser stability; Optical design; Optical films; Optical pulses; Solid lasers; Spatial coherence;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location
Baltimore, MD, USA
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/QELS.2007.4431516
Filename
4431516
Link To Document