Title :
AC electrical breakdown in plasma-polymerized thin films
Author_Institution :
Shinshu University
Keywords :
Breakdown voltage; Dielectric breakdown; Dielectric thin films; Electric breakdown; Electrodes; Plasma properties; Polymer films; Semiconductor films; Temperature dependence; Transistors;
Conference_Titel :
Electrical Insulation and Dielectric Phenomena, 1991. CEIDP. 1991 Annual Report. Conference on
DOI :
10.1109/CEIDP.1991.763867