DocumentCode :
2790456
Title :
AC electrical breakdown in plasma-polymerized thin films
Author :
Miyairi, K.
Author_Institution :
Shinshu University
fYear :
1991
fDate :
1991
Firstpage :
488
Lastpage :
493
Keywords :
Breakdown voltage; Dielectric breakdown; Dielectric thin films; Electric breakdown; Electrodes; Plasma properties; Polymer films; Semiconductor films; Temperature dependence; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Insulation and Dielectric Phenomena, 1991. CEIDP. 1991 Annual Report. Conference on
Type :
conf
DOI :
10.1109/CEIDP.1991.763867
Filename :
763867
Link To Document :
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