DocumentCode
2790456
Title
AC electrical breakdown in plasma-polymerized thin films
Author
Miyairi, K.
Author_Institution
Shinshu University
fYear
1991
fDate
1991
Firstpage
488
Lastpage
493
Keywords
Breakdown voltage; Dielectric breakdown; Dielectric thin films; Electric breakdown; Electrodes; Plasma properties; Polymer films; Semiconductor films; Temperature dependence; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Insulation and Dielectric Phenomena, 1991. CEIDP. 1991 Annual Report. Conference on
Type
conf
DOI
10.1109/CEIDP.1991.763867
Filename
763867
Link To Document