DocumentCode
2790486
Title
The impact of ultrashort femtosecond pulse-shaping technology for micromachining
Author
Dantus, Marcos
Author_Institution
Department of Chemistry and Department of Physics and Astronomy, Michigan State University, East Lansing, 48824, USA
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
1
Abstract
Ultrashort laser pulses improve micromachining but they suffer significant phase distortions when focused by microscope objectives. Breakthrough technology to correct high order phase distortions is used to improve the machining characteristics of metals and semiconductors.
Keywords
Chemical lasers; Laser noise; Laser theory; Micromachining; Optical harmonic generation; Optical pulse shaping; Optical pulses; Semiconductor lasers; Surface emitting lasers; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location
Baltimore, MD, USA
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/QELS.2007.4431526
Filename
4431526
Link To Document