Title :
A real time process control system for IC testing
Author :
Kondo, Jeff ; Bose, Sharada ; Adduci, Doug
Author_Institution :
Northwest IC Div., Hewlett-Packard, Corvallis, OR, USA
Abstract :
In IC manufacturing, testing plays an important role. Once a wafer completes fabrication, each individual die on the wafer must pass a battery of tests before assembly. This testing process produces a large amount of data that must be converted into useful information, accessible in the right format, to be useful to yield engineers, test engineers, design engineers, process engineers, and production operators. The main goals of the Test Productivity System (TPS) are to apply real-time statistical process control the techniques to IC testing in order to reduce failures, shorten the yield improvement learning curve, and increase the overall efficiency of the production operation, thereby reducing manufacturing costs while producing a higher quality product
Keywords :
automatic testing; electronic engineering computing; integrated circuit manufacture; integrated circuit testing; manufacturing computer control; process computer control; real-time systems; statistical process control; IC testing; Test Productivity System; efficiency; failures; manufacturing costs; product quality; production operation; real-time statistical process control; wafer die testing; yield improvement learning curve; Assembly; Batteries; Data engineering; Design engineering; Fabrication; Integrated circuit testing; Manufacturing; Process control; Real time systems; System testing;
Conference_Titel :
System Sciences, 1991. Proceedings of the Twenty-Fourth Annual Hawaii International Conference on
Conference_Location :
Kauai, HI
DOI :
10.1109/HICSS.1991.183995