A Hardware Platform for Tuning of MEMS Devices Using Closed-Loop Frequency Response

Author

Ferguson, Michael I. ; Keymeulen, Didier ; Hayworth, Ken ; Blaes, Brent ; Peay, Chris ; Yee, Karl ; MacDonald, Eric ; Foor, David

fYear

2005

fDate

5-12 March 2005

Firstpage

1

Lastpage

7

Abstract

We report on the development of a hardware platform for integrated tuning and closed-loop operation of MEMS gyroscopes. The platform was developed and tested for the second generation JPL/Boeing post-resonator MEMS gyroscope. The control of this device is implemented through a digital design on a field programmable gate array (FPGA). A software interface allows the user to configure, calibrate, and tune the bias voltages on the microgyro. The interface easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip

Keywords

closed loop systems; digital circuits; field programmable gate arrays; frequency response; gyroscopes; micromechanical devices; tuning; MEMS gyroscopes; closed-loop frequency response; device tuning; digital design; field programmable gate array; hardware platform; integrated tuning; microgyro; software interface; Field programmable gate arrays; Frequency response; Gyroscopes; Hardware; Microelectromechanical devices; Micromechanical devices; Optical resonators; Silicon; Tuning; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Aerospace Conference, 2005 IEEE

Conference_Location

Big Sky, MT

Print_ISBN

0-7803-8870-4

Type

conf

DOI

10.1109/AERO.2005.1559563

Filename

1559563