Title :
Epitaxial liftoff as a method-of manufacturing large area crystalline silicon transistor arrays for AMLCD´s
Author :
Sickmiller, M. ; Yablonovitch, E.
Author_Institution :
UCLA Electrical Engineering Department, Los Angeles, CA
Abstract :
Crystalline silicon transistors offer better performance and higher speeds than amorphous or poly-silicon transistors. This leads to higher resolution, larger displays, and better performance of the AMLCD. Using pre-fabricated crystalline silicon devices allows for the advantage of more complex circuit design within the pixel such as the incorporation of storage capacitors, or multi-device circuits at each pixel. This technique also offers a simplified, lower cost alternative to present production processes.
Keywords :
Active matrix liquid crystal displays; Crystallization; Etching; Foundries; Glass; Manufacturing; Silicon on insulator technology; Substrates; Thin film transistors; Wafer bonding;
Conference_Titel :
Flat Panel Display Technology/Technologies for a Global Information Infrastructure/ICs for New Age Lightwave Communications/RF Optoelectronics, 1995 Digest of the LEOS Summer Topical Meetings
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-2448-X
DOI :
10.1109/LEOSST.1995.763973