Title :
A GaN UV Light Emitting Diode
Author :
Akinwande, A.I. ; Goldenberg, B.L. ; Horning, R.D. ; King, J.
Author_Institution :
Honeywell Technology Center, Bloomington, MN
Abstract :
In our studies, p-n junction LEDs were grown by MOCVD on (0001) sapphire substrates. The vertical MOCVD reactor has separate inlets for ammonia (NH3) and the metalorganics. The system held a pressure of 76 Torr with a constant hydrogen flow of 1.9 l/min. Source materials for this reactor included triethylaluminum (TEA), triethylgallium (TEG), bismethylcyclopentadienyl magnesium (MCp2Mg) and silane (SiH4.
Keywords :
Annealing; Chemical technology; Conducting materials; Contact resistance; Gallium nitride; Inductors; Light emitting diodes; MOCVD; P-n junctions; Temperature;
Conference_Titel :
Flat Panel Display Technology/Technologies for a Global Information Infrastructure/ICs for New Age Lightwave Communications/RF Optoelectronics, 1995 Digest of the LEOS Summer Topical Meetings
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-2448-X
DOI :
10.1109/LEOSST.1995.763984