Title :
Reliability problems due to ionic conductivity of IC encapsulation materials under high voltage conditions
Author :
Bruggers, H.J. ; Rongen, R.T.H. ; Meeuwsen, C.P. ; Ludikhuize, A.W.
Author_Institution :
Consumer Syst., Philips Semicond., Nijmegen, Netherlands
Abstract :
In high voltage integrated circuits operating at high temperatures, the strong electric field spreading out from the high voltage bond pad via the encapsulation material is responsible for charge accumulation at the interface towards the nitride passivation layer. In low-voltage circuit blocks, this might lead to parasitic leakage currents. The physical background on the dynamics of the charge redistribution within the encapsulation material is discussed. With a proposed model, we show that the ionic conductivity is the root cause of the problem. Therefore, malfunction of the low voltage circuit blocks can be suppressed to a large extent by using very pure encapsulation materials
Keywords :
electric charge; encapsulation; integrated circuit bonding; integrated circuit modelling; integrated circuit reliability; integrated circuit testing; ionic conductivity; leakage currents; passivation; power integrated circuits; IC encapsulation materials; IC model; Si3N4; charge accumulation; charge redistribution dynamics; encapsulation material; encapsulation material purity; high temperature operation; high voltage bond pad; high voltage conditions; high voltage integrated circuits; ionic conductivity; low voltage circuit block malfunction suppression; low-voltage circuit blocks; nitride passivation layer interface; parasitic leakage currents; reliability; spreading electric field; Bonding; Capacitors; Creep; Encapsulation; Integrated circuit reliability; Leakage current; Materials reliability; Sensor phenomena and characterization; Temperature sensors; Voltage;
Conference_Titel :
Power Semiconductor Devices and ICs, 1999. ISPSD '99. Proceedings., The 11th International Symposium on
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-5290-4
DOI :
10.1109/ISPSD.1999.764096