Title :
Fabrication of c-axis oriented PbTiO3 transducer films for SAW in high-Tc superconducting films
Author :
Akinaga, Masahiro ; Fukuda, Hideaki ; Fukami, Takeshi
Author_Institution :
Dept. of Phys., Fukuoka Univ. of Educ., Munataka, Japan
Abstract :
PbTiO3 thin films with preferred c-axis orientation were prepared on single crystal MgO (100) substrates by the RF-sputtering method. These films were used as substrate for superconducting Bi(Pb)-Sr-Ca-Cu-O films and also used as transducer films for surface acoustic waves (SAWs)
Keywords :
bismuth compounds; calcium compounds; high-temperature superconductors; lead compounds; piezoelectric transducers; sputtered coatings; strontium compounds; surface acoustic wave devices; Bi-Pb-Sr-Ca-Cu-O films; MgO; MgO substrates; PbTiO3 thin films; RF-sputtering; SAW; c-axis orientation; high temperature superconductors; high-Tc superconducting films; Fabrication; Ferroelectric films; Lead; Powders; Sputtering; Substrates; Superconducting films; Superconducting thin films; Surface acoustic waves; Transducers;
Conference_Titel :
Properties and Applications of Dielectric Materials, 1991., Proceedings of the 3rd International Conference on
Conference_Location :
Tokyo
Print_ISBN :
0-87942-568-7
DOI :
10.1109/ICPADM.1991.172150
