DocumentCode
2794384
Title
Nanostructures be Laser Direct Etching of Silicon
Author
Mullenborn, M. ; Dirac, H. ; Grey, F.
fYear
1996
fDate
8-13 Sept. 1996
Firstpage
154
Lastpage
154
Keywords
Atom lasers; Atomic beams; Atomic layer deposition; Etching; Laser theory; Laser tuning; Lithography; Nanostructures; Optical device fabrication; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics Conference, 1996. EQEC '96., 1996 European
Conference_Location
Hamburg, Germany
Print_ISBN
0-7803-3171-0
Type
conf
DOI
10.1109/EQEC.1996.561780
Filename
561780
Link To Document