Title :
Nanostructures be Laser Direct Etching of Silicon
Author :
Mullenborn, M. ; Dirac, H. ; Grey, F.
Keywords :
Atom lasers; Atomic beams; Atomic layer deposition; Etching; Laser theory; Laser tuning; Lithography; Nanostructures; Optical device fabrication; Silicon;
Conference_Titel :
Quantum Electronics Conference, 1996. EQEC '96., 1996 European
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3171-0
DOI :
10.1109/EQEC.1996.561780
