DocumentCode

2795077

Title

Writing Nanostructures with a Helium Beam

Author

Nowak, Sophie ; Pfau, Timo ; Mlynck, J.

fYear

1996

fDate

8-13 Sept. 1996

Firstpage

156

Lastpage

156

Keywords

Atom optics; Cameras; Energy resolution; Gold; Helium; Lithography; Metastasis; Nanofabrication; Nanostructures; Writing;

fLanguage

English

Publisher

ieee

Conference_Titel

Quantum Electronics Conference, 1996. EQEC '96., 1996 European

Conference_Location

Hamburg, Germany

Print_ISBN

0-7803-3171-0

Type

conf

DOI

10.1109/EQEC.1996.561784

Filename

561784