Title :
Writing Nanostructures with a Helium Beam
Author :
Nowak, Sophie ; Pfau, Timo ; Mlynck, J.
Keywords :
Atom optics; Cameras; Energy resolution; Gold; Helium; Lithography; Metastasis; Nanofabrication; Nanostructures; Writing;
Conference_Titel :
Quantum Electronics Conference, 1996. EQEC '96., 1996 European
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3171-0
DOI :
10.1109/EQEC.1996.561784
