Title :
Mechanical characteristics of LTCC (Low Temperature Cofired Ceramics) -tapes for mechanical application
Author :
Unger, Michael ; Smetana, Walter ; Ehrenzweig, Wolfgang
Author_Institution :
Vienna Univ. of Technol., Vienna
Abstract :
Various LTCC-tapes of different suppliers have been evaluated concerning their mechanical properties which are required for finite-element-analyses (FEA) in order to design mechanical operating sensors. Bending tests on fired tape samples have been conducted in order to investigate the influence of processing conditions, applied metallization as well as geometrical parameters on the mechanical characteristics. Additionally piezo-resistive thick-film sensors have been applied onto the LTCC-beam elements to correlate bending stress with the sensor signal.
Keywords :
bending; ceramics; finite element analysis; piezoresistive devices; thick film sensors; LTCC; bending stress; finite-element-analyses; geometrical parameters; low temperature cofired ceramics tapes; mechanical characteristics; mechanical operating sensors; piezoresistive thick-film sensors; Ceramics; Finite element methods; Mechanical factors; Mechanical sensors; Metallization; Sensor phenomena and characterization; Stress; Temperature sensors; Testing; Thick film sensors;
Conference_Titel :
Electronics Technology, 30th International Spring Seminar on
Conference_Location :
Cluj-Napoca
Print_ISBN :
987-1-4244-1218-1
Electronic_ISBN :
987-1-4244-1218-1
DOI :
10.1109/ISSE.2007.4432821
