Title :
The effect of frequency on the lifetime of a surface micromachined microengine driving a load
Author :
Tanner, Danelle M. ; Miller, William M. ; Eaton, William P. ; Irwin, Lloyd W. ; Peterson, Ken A. ; Dugger, Michal T. ; Senft, Donna C. ; Smith, Norman F. ; Tangyunyong, Paiboon ; Miller, Samuel L.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
March 31 1998-April 2 1998
Abstract :
Experiments have been performed on surface micromachined microengines driving load gears to determine the effect of the rotation frequency on median cycles to failure. We did observe a frequency dependence and have developed a model based on fundamental wear mechanisms and forces exhibited in resonant mechanical systems. Stressing loaded microengines caused observable wear in the rotating joints and, in a few instances, led to fracture of the pin joint in the drive gear.
Keywords :
failure analysis; fracture; micromachining; micromotors; rotation; semiconductor device reliability; semiconductor device testing; wear; drive gear pin joint fracture; failure model; frequency dependence; frequency effects; load gear driving; loaded microengine stressing; loaded microengines; median cycles-to-failure; resonant mechanical system forces; rotating joint wear; rotation frequency; surface micromachined microengine lifetime; wear mechanisms; Actuators; Drives; Gears; Laboratories; Microactuators; Microelectromechanical devices; Micromechanical devices; Resonance; Resonant frequency; Springs;
Conference_Titel :
Reliability Physics Symposium Proceedings, 1998. 36th Annual. 1998 IEEE International
Conference_Location :
Reno, NV, USA
Print_ISBN :
0-7803-4400-6
DOI :
10.1109/RELPHY.1998.670438
