DocumentCode :
2797199
Title :
Oral presentations
fYear :
2007
fDate :
21-25 Jan. 2007
Keywords :
Acoustic sensors; Automotive engineering; CMOS technology; Capacitive sensors; Fluidics; Gyroscopes; Micromechanical devices; Sensor arrays; Sensor systems; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo, Japan
ISSN :
1084-6999
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2007.4432956
Filename :
4432956
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2797199
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