• DocumentCode
    2797525
  • Title

    A miniaturised integrated QCM-based electronic nose microsystem

  • Author

    Frisk, Thomas ; Eng, Lars ; Guo, Shaohua ; Van Der Wijngaart, Wouter ; Stemme, Göran

  • Author_Institution
    R. Inst. of Technol., Stockholm
  • fYear
    2007
  • fDate
    21-25 Jan. 2007
  • Firstpage
    417
  • Lastpage
    420
  • Abstract
    We designed, fabricated and successfully tested an integrated miniaturised quartz crystal microbalance (QCM) based electronic nose microsystem. The microsystem is an assembly of four parts: 1. a micromachined gas-liquid interface with integrated fluid channels and electrical conductors, 2. an anisotropically conductive double-sided adhesive film, 3. a QCM crystal and 4. a polymer cap with fluid and electrical ports. The choice of the multifunctional materials and the geometric features of the four-component microsystem allow a functional integration of a QCM crystal, electrical contacts, fluidic contacts and a sample interface in a single system with minimal assembly effort, a potential for low-cost manufacturing, and a few orders of magnitude reduction in system size (12* 12*4 mm3) and weight compared to commercially available instruments. The system detected ecstasy in the 100 ng range within 30 seconds.
  • Keywords
    electrical contacts; electronic noses; microbalances; microfluidics; micromachining; microsensors; anisotropically conductive double-sided adhesive film; electrical conductors; electrical contacts; electronic nose microsystem; fluidic contacts; integrated fluid channels; micromachined gas-liquid interface; miniaturised integrated QCM; multifunctional materials; quartz crystal microbalance; time 30 s; Anisotropic conductive films; Anisotropic magnetoresistance; Assembly systems; Conducting materials; Contacts; Crystalline materials; Electronic equipment testing; Electronic noses; Manufacturing; Polymers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
  • Conference_Location
    Hyogo
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-095-5
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2007.4432979
  • Filename
    4432979