DocumentCode
2797525
Title
A miniaturised integrated QCM-based electronic nose microsystem
Author
Frisk, Thomas ; Eng, Lars ; Guo, Shaohua ; Van Der Wijngaart, Wouter ; Stemme, Göran
Author_Institution
R. Inst. of Technol., Stockholm
fYear
2007
fDate
21-25 Jan. 2007
Firstpage
417
Lastpage
420
Abstract
We designed, fabricated and successfully tested an integrated miniaturised quartz crystal microbalance (QCM) based electronic nose microsystem. The microsystem is an assembly of four parts: 1. a micromachined gas-liquid interface with integrated fluid channels and electrical conductors, 2. an anisotropically conductive double-sided adhesive film, 3. a QCM crystal and 4. a polymer cap with fluid and electrical ports. The choice of the multifunctional materials and the geometric features of the four-component microsystem allow a functional integration of a QCM crystal, electrical contacts, fluidic contacts and a sample interface in a single system with minimal assembly effort, a potential for low-cost manufacturing, and a few orders of magnitude reduction in system size (12* 12*4 mm3) and weight compared to commercially available instruments. The system detected ecstasy in the 100 ng range within 30 seconds.
Keywords
electrical contacts; electronic noses; microbalances; microfluidics; micromachining; microsensors; anisotropically conductive double-sided adhesive film; electrical conductors; electrical contacts; electronic nose microsystem; fluidic contacts; integrated fluid channels; micromachined gas-liquid interface; miniaturised integrated QCM; multifunctional materials; quartz crystal microbalance; time 30 s; Anisotropic conductive films; Anisotropic magnetoresistance; Assembly systems; Conducting materials; Contacts; Crystalline materials; Electronic equipment testing; Electronic noses; Manufacturing; Polymers;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location
Hyogo
ISSN
1084-6999
Print_ISBN
978-1-4244-095-5
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2007.4432979
Filename
4432979
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