Title :
A miniaturised integrated QCM-based electronic nose microsystem
Author :
Frisk, Thomas ; Eng, Lars ; Guo, Shaohua ; Van Der Wijngaart, Wouter ; Stemme, Göran
Author_Institution :
R. Inst. of Technol., Stockholm
Abstract :
We designed, fabricated and successfully tested an integrated miniaturised quartz crystal microbalance (QCM) based electronic nose microsystem. The microsystem is an assembly of four parts: 1. a micromachined gas-liquid interface with integrated fluid channels and electrical conductors, 2. an anisotropically conductive double-sided adhesive film, 3. a QCM crystal and 4. a polymer cap with fluid and electrical ports. The choice of the multifunctional materials and the geometric features of the four-component microsystem allow a functional integration of a QCM crystal, electrical contacts, fluidic contacts and a sample interface in a single system with minimal assembly effort, a potential for low-cost manufacturing, and a few orders of magnitude reduction in system size (12* 12*4 mm3) and weight compared to commercially available instruments. The system detected ecstasy in the 100 ng range within 30 seconds.
Keywords :
electrical contacts; electronic noses; microbalances; microfluidics; micromachining; microsensors; anisotropically conductive double-sided adhesive film; electrical conductors; electrical contacts; electronic nose microsystem; fluidic contacts; integrated fluid channels; micromachined gas-liquid interface; miniaturised integrated QCM; multifunctional materials; quartz crystal microbalance; time 30 s; Anisotropic conductive films; Anisotropic magnetoresistance; Assembly systems; Conducting materials; Contacts; Crystalline materials; Electronic equipment testing; Electronic noses; Manufacturing; Polymers;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4432979