Title :
Hydrophobic ZnO used in EWOD technology and SAW devices for better bio-fluid slip AT microchannel walls controlled by DC pulses
Author :
Sirbu, Lilian ; Ghimpu, Lidia ; Muller, Rudolf ; Voda, I. ; Tiginyanu, Ion ; Ursaki, Veaceslav ; Dascalu, T.
Author_Institution :
D. Ghitu Inst. of Electron. Eng. & Nanotechnol., Chisinau, Moldova
Abstract :
In this paper, we will review the electrowetting on dielectric (EWOD) principles applied to microfluidic devices. We replaced the usually used teflon surface by ZnO transparent film in order to obtain a device with an optical weak absorption in the diapason ranged from VIS to far-MIR and THz waves. We studied the piezoelectric characteristics of ZnO films obtained by RF magnetron sputtering in Ar+O2 plasma. ZnO films have been grown on SiO2/Si(100) substrate using a zinc oxide target. The morphological characteristics of the films were investigated by atomic force microscopy (AFM). We present the THz spectra from ZnO films.
Keywords :
hydrophobicity; microfluidics; surface acoustic wave devices; wetting; zinc compounds; AFM; DC pulses; EWOD technology; RF magnetron sputtering; SAW devices; THz spectra; ZnO; ZnO transparent film; atomic force microscopy; biofluid slip AT microchannel walls; electrowetting on dielectric principles; hydrophobic ZnO; microfluidic devices; optical weak absorption; zinc oxide; Dielectrics; Films; Liquids; Metamaterials; Microchannel; Surface acoustic waves; Zinc oxide; EWOD; Electrowetting; Microdroplet; SAW; THz-TDS; ZnO;
Conference_Titel :
Semiconductor Conference (CAS), 2012 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4673-0737-6
DOI :
10.1109/SMICND.2012.6400645
