Title :
3 dimensionally combined pyrolyzed polymer sensor and heater toward all polymeric gas detection system
Author :
Jeong, Ok Chan ; Konishi, Satoshi
Author_Institution :
Ritsumeikan Univ., Shiga
Abstract :
This paper proposes for the first time all polymeric gas detection system consisting of the 3 dimensionally combined carbon structures and the gas regulator with the three-stage pneumatic valves. The pyrolyzed photo-resist structure as an absorbent of nitrogen dioxide sensor and 3D bridge-type resistive heater are fabricated and assembled with the gas regulator. The valve efficiency of the gas regulator and the sensitivity of the gas sensor to NO2 are characterized.
Keywords :
carbon; gas sensors; nitrogen compounds; photoresists; pneumatic control equipment; polymers; pyrolysis; valves; 3D bridge-type resistive heater; NO2; carbon structures; gas regulator; gas sensor; nitrogen dioxide sensor; polymeric gas detection system; pyrolyzed photo-resist structure; three dimensionality combined pyrolyzed polymer sensor; three-stage pneumatic valves; Electrical resistance measurement; Fabrication; Gas detectors; Polymers; Regulators; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Thermal sensors; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433027
