Micromachined front-end for 60 GHz applications

In this paper we present the electromagnetic modeling, fabrication and experimental results of a on-chip 2×1 folded slot dipole antenna array manufactured through silicon micromachining, working in the 60 GHz band. The measurements are in very good agreement with the simulations and demonstrate a large working band of ~20% (54-65 GHz) for a return loss better than 10 dB.