Title :
Tunable light grating integrated with high-voltage driver IC for image projection display
Author :
Takahashi, Kazuhiro ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi ; Suzuki, Kazuhiro ; Funaki, Hideyuki ; Itaya, Kazuhiko
Author_Institution :
Univ. of Tokyo, Tokyo
Abstract :
This paper presents a monolithic integration technique of MEMS grating light valves with high-voltage (40 V) driver circuits that target for image projection display devices. Driver circuits were prepared on an 8-mum-thick SOI (Silicon-on- Insulator) wafer by the DMO S (Double-diffused Metal Oxide Semiconductor) processes, after which the MEMS grating were integrated in the identical SOI layer by post-processing using the DRIE (Deep Reactive Ion Etching). In our work, optical light angle is modulated by changing the period of the MEMS grating pixel by means of electrostatic actuation. Optical diffraction angles of 6.6deg (OFF-state) and 3.3 deg (ON-State) were obtained with drive voltage of 0 V and 40 V, respectively.
Keywords :
diffraction gratings; display devices; driver circuits; electrostatic actuators; integrated optoelectronics; light diffraction; light valves; micro-optomechanical devices; micromirrors; monolithic integrated circuits; optical tuning; power integrated circuits; silicon-on-insulator; sputter etching; MEMS grating light valves; Si-SiO2; deep reactive ion etching; double-diffused metal oxide semiconductor process; electrostatic actuation; high-voltage driver IC; image projection display devices; monolithically integrated microelectoromechanical grating; optical diffraction angles; optical light angle modulation; size 8 mum; thick silicon-on- insulator wafer; tunable light grating; voltage 0 V; voltage 40 V; Displays; Driver circuits; Gratings; Insulation; Micromechanical devices; Monolithic integrated circuits; Optical modulation; Silicon on insulator technology; Tunable circuits and devices; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433037
