Title :
Optical and sensory properties of ZnO nanofibrous layers grown by magnetron sputtering
Author :
Ghimpu, Lidia ; Tiginyanu, I.M. ; Ursaki, Veaceslav ; Lupan, Oleg ; Chow, L. ; Rudzevich, Yauheni ; Lin, Yashen
Author_Institution :
Lab. of Nanotechnol., Inst. of Electron. Eng. & Nanotechnol., Chisinau, Moldova
Abstract :
This paper presents optical and sensory properties of ZnO nanofirous layers grown by a cost-effective and fast fabrication method based on magnetron sputtering. The as-prepared nanofibrous layers show good conductive properties which are of interest for gas sensing structures. Their application for hydrogen detection is demonstrated in premiere, and the developed H2 sensor structure exhibits good response / recovery behavior under ultraviolet (UV) light, and good sensitivity. This method is cost-effective and facile and has a great potential for various sensorial applications.
Keywords :
II-VI semiconductors; electrical conductivity; gas sensors; hydrogen; nanofabrication; nanofibres; nanosensors; photoluminescence; semiconductor growth; sputter deposition; wide band gap semiconductors; zinc compounds; H2; ZnO; conductive properties; gas sensing structures; hydrogen detection; magnetron sputtering; nanofibrous layers; optical properties; recovery behavior; sensory properties; ultraviolet light; Hydrogen; Magnetic resonance imaging; Sensors; Sputtering; Temperature measurement; Zinc oxide; UV; XRD; ZnO nanofibrous; magnetron sputtering; photoluminescence; sensor;
Conference_Titel :
Semiconductor Conference (CAS), 2012 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4673-0737-6
DOI :
10.1109/SMICND.2012.6400674
