Numerical simulation of piezoelectricaly actuated valveless micropump for hemofiltration system

Kidney failure is growing exponentially in the world. Hence, it is urgently required to develop efficient and low cost blood filtration system that is capable to remove the waste products from the blood. In this paper we report a novel design of MEMS based hemofiltration (HF) system having four components like electronic section, blood supply section, blood filtration section and drug supply section. Coupled multifield analysis piezoelectrically actuated polymeric valveless micropump has been conducted for HF system. Micropump consisted of thee serial actuators, nozzle/diffuser elements and three chambers. The maximum deflection of 6.808 μm has been obtained at applied voltage of 105 V. Maximum flow rate of 501 μL/min has been obtained at 200 Hz with applied 105 V by keeping actuator and membrane thickness constant 0.2 mm each with diffuser angle 10⁰.