DocumentCode
2798561
Title
Contact materials and reliability for high power RF-MEMS switches
Author
Kwon, Hyouk ; Choi, Dong-June ; Park, Jae-Hyoung ; Lee, Hee-Chul ; Park, Yong-Hee ; Kim, Yong-Dae ; Nam, Hyo-Jin ; Joo, Young-Chang ; Bu, Jong-Uk
Author_Institution
LG Electron. Inst. of Technol., Seoul
fYear
2007
fDate
21-25 Jan. 2007
Firstpage
231
Lastpage
234
Abstract
This paper presents test and characterization of various thin film contact materials for reliable high power RF- MEMS switches. We selected Au, Pt, Ir, and AuPt alloys for contact materials and fundamentally studied on contact phenomena and reliability of similar or dissimilar contacts using a contact measurement apparatus at high current condition. We also investigated the electrical contact behavior of the MEMS switches. From these studies, Au-to-Pt, Pt-to-Pt and Au-to-Ir contact showed reliable characteristics for the high power RF-MEMS switches.
Keywords
microswitches; reliability; RF-MEMS switch; contact measurement apparatus; reliability characteristics; thin film contact material; Contacts; Current measurement; Gold alloys; Materials reliability; Materials testing; Microswitches; Platinum alloys; Radiofrequency microelectromechanical systems; Switches; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location
Hyogo
ISSN
1084-6999
Print_ISBN
978-1-4244-095-5
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2007.4433055
Filename
4433055
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