Title :
Contact materials and reliability for high power RF-MEMS switches
Author :
Kwon, Hyouk ; Choi, Dong-June ; Park, Jae-Hyoung ; Lee, Hee-Chul ; Park, Yong-Hee ; Kim, Yong-Dae ; Nam, Hyo-Jin ; Joo, Young-Chang ; Bu, Jong-Uk
Author_Institution :
LG Electron. Inst. of Technol., Seoul
Abstract :
This paper presents test and characterization of various thin film contact materials for reliable high power RF- MEMS switches. We selected Au, Pt, Ir, and AuPt alloys for contact materials and fundamentally studied on contact phenomena and reliability of similar or dissimilar contacts using a contact measurement apparatus at high current condition. We also investigated the electrical contact behavior of the MEMS switches. From these studies, Au-to-Pt, Pt-to-Pt and Au-to-Ir contact showed reliable characteristics for the high power RF-MEMS switches.
Keywords :
microswitches; reliability; RF-MEMS switch; contact measurement apparatus; reliability characteristics; thin film contact material; Contacts; Current measurement; Gold alloys; Materials reliability; Materials testing; Microswitches; Platinum alloys; Radiofrequency microelectromechanical systems; Switches; Transistors;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433055
