Title :
Nano-metal-ink-based electrode embedded in parylene HARS with the aid of the capillary effect
Author :
Takumi, T. ; Suzuki, Yuji ; Sakurai, Noriko ; Kasagi, Nobuhide ; Sakane, Yoshihiko
Author_Institution :
Univ. of Tokyo, Tokyo
Abstract :
Microfabrication technology for free-standing parylene high-aspect-ratio structures (HARS) with embedded electrodes has been developed. Nano- metal ink is infused into capillaries in parylene HARS using the surface tension force. Micro electrodes in complex parylene springs have been successfully developed, and their robustness is demonstrated under large-amplitude in-plane vibration of the springs.
Keywords :
microsensors; organic compounds; surface tension; transducers; HARS; capillary effect; electrode embedded parylene; high aspect ratio structures; microfabrication technology; nano metal ink; surface tension force; Electrodes; Etching; Force sensors; Ink; Micromechanical devices; Polymers; Springs; Substrates; Surface tension; Transducers;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433061
