DocumentCode
2798661
Title
Nano-metal-ink-based electrode embedded in parylene HARS with the aid of the capillary effect
Author
Takumi, T. ; Suzuki, Yuji ; Sakurai, Noriko ; Kasagi, Nobuhide ; Sakane, Yoshihiko
Author_Institution
Univ. of Tokyo, Tokyo
fYear
2007
fDate
21-25 Jan. 2007
Firstpage
313
Lastpage
316
Abstract
Microfabrication technology for free-standing parylene high-aspect-ratio structures (HARS) with embedded electrodes has been developed. Nano- metal ink is infused into capillaries in parylene HARS using the surface tension force. Micro electrodes in complex parylene springs have been successfully developed, and their robustness is demonstrated under large-amplitude in-plane vibration of the springs.
Keywords
microsensors; organic compounds; surface tension; transducers; HARS; capillary effect; electrode embedded parylene; high aspect ratio structures; microfabrication technology; nano metal ink; surface tension force; Electrodes; Etching; Force sensors; Ink; Micromechanical devices; Polymers; Springs; Substrates; Surface tension; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location
Hyogo
ISSN
1084-6999
Print_ISBN
978-1-4244-095-5
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2007.4433061
Filename
4433061
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