DocumentCode
2798927
Title
Nanoelectromechanical systems for biology: Where to go from now?
Author
Nicu, L. ; Leichle, T.
Author_Institution
LAAS, Toulouse, France
Volume
1
fYear
2012
fDate
15-17 Oct. 2012
Firstpage
51
Lastpage
56
Abstract
Despite the fact that bio-nano-electromechanical systems (bioNEMS) are considered as the ultimate mechanical systems for complex biosensing, one still has to demonstrate that highly sensitive nanomechanical elements can be readily mass-produced in terms of both fabrication and biofunctionalization technologies. In this paper, we discuss a fundamental change of technological paradigm based on nanoprinting-techniques which implementation will successfully address all the bioNEMS-related issues at once. The choice of the nanoprinting-based techniques as a generic way to both fabricating (by transfer-printing) and functionalizing (by nano-contact printing) ultra-dense arrays of NEMS (thousands per cm2) could lead to easy-to implement, flexible recipes for front-end and back-end processing while avoiding a long series of technological steps which most of the times dramatically impacts the yield, and subsequently the cost of fabrication.
Keywords
biosensors; nanobiotechnology; nanocontacts; nanofabrication; nanosensors; back-end processing; bioNEMS; biofunctionalization technology; biology; bionanoelectromechanical systems; biosensing; front-end processing; highly sensitive nanomechanical elements; nanocontact printing; nanoprinting technique; technological paradigm; transfer printing; ultimate mechanical systems; ultradense arrays; Biosensors; Nanobioscience; Nanoelectromechanical systems; Nanoscale devices; Nanostructures; Probes; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2012 International
Conference_Location
Sinaia
ISSN
1545-857X
Print_ISBN
978-1-4673-0737-6
Type
conf
DOI
10.1109/SMICND.2012.6400697
Filename
6400697
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