• DocumentCode
    2798927
  • Title

    Nanoelectromechanical systems for biology: Where to go from now?

  • Author

    Nicu, L. ; Leichle, T.

  • Author_Institution
    LAAS, Toulouse, France
  • Volume
    1
  • fYear
    2012
  • fDate
    15-17 Oct. 2012
  • Firstpage
    51
  • Lastpage
    56
  • Abstract
    Despite the fact that bio-nano-electromechanical systems (bioNEMS) are considered as the ultimate mechanical systems for complex biosensing, one still has to demonstrate that highly sensitive nanomechanical elements can be readily mass-produced in terms of both fabrication and biofunctionalization technologies. In this paper, we discuss a fundamental change of technological paradigm based on nanoprinting-techniques which implementation will successfully address all the bioNEMS-related issues at once. The choice of the nanoprinting-based techniques as a generic way to both fabricating (by transfer-printing) and functionalizing (by nano-contact printing) ultra-dense arrays of NEMS (thousands per cm2) could lead to easy-to implement, flexible recipes for front-end and back-end processing while avoiding a long series of technological steps which most of the times dramatically impacts the yield, and subsequently the cost of fabrication.
  • Keywords
    biosensors; nanobiotechnology; nanocontacts; nanofabrication; nanosensors; back-end processing; bioNEMS; biofunctionalization technology; biology; bionanoelectromechanical systems; biosensing; front-end processing; highly sensitive nanomechanical elements; nanocontact printing; nanoprinting technique; technological paradigm; transfer printing; ultimate mechanical systems; ultradense arrays; Biosensors; Nanobioscience; Nanoelectromechanical systems; Nanoscale devices; Nanostructures; Probes; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2012 International
  • Conference_Location
    Sinaia
  • ISSN
    1545-857X
  • Print_ISBN
    978-1-4673-0737-6
  • Type

    conf

  • DOI
    10.1109/SMICND.2012.6400697
  • Filename
    6400697