DocumentCode
2799091
Title
Rhombic-shaped thermal actuator array for evenly-distributed very large displacement
Author
Yu, A.B. ; Zhang, X.M. ; Cai, H. ; Zhang, Q.X. ; Liu, A.Q.
Author_Institution
Nanyang Technol. Univ., Singapore
fYear
2007
fDate
21-25 Jan. 2007
Firstpage
663
Lastpage
666
Abstract
This paper presents a design of thermal actuator array to generate evenly-distributed displacement by cascading an array of rhombic-shaped units. Such design is implemented to a tunable grating to tune the period by 61% and to produce a total displacement of 215 mum. Such design is scalable to the sub-wavelength level, making its very attractive to many tunable nano-photonic devices.
Keywords
microactuators; rhombic-shaped unit; thermal actuator array; tunable grating; Arm; Electrostatic actuators; Gratings; Laser tuning; Microelectromechanical devices; Micromechanical devices; Thermal engineering; Thermal expansion; Thermal force; Tunable circuits and devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location
Hyogo
ISSN
1084-6999
Print_ISBN
978-1-4244-095-5
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2007.4433084
Filename
4433084
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