SOI sensing technologies for harsh environment

Author

Udrea, F. ; Ali, Syed Zishan ; Brezeanu, Mihai ; Dumitru, V. ; Buiu, Octavian ; Poenaru, I. ; Chowdhury, M.F. ; De Luca, A. ; Gardner, Julian W.

Author_Institution

Cambridge CMOS Sensors Ltd., Cambridge, UK

Volume

1

fYear

2012

fDate

15-17 Oct. 2012

Firstpage

3

Lastpage

10

Abstract

This paper reviews and addresses certain aspects of Silicon-On-Insulator (SOI) technologies for a harsh environment. The paper first describes the need for specialized sensors in applications such as (i) domestic and other small-scale boilers, (ii) CO₂ Capture and Sequestration, (iii) oil & gas storage and transportation, and (iv) automotive. We describe in brief the advantages and special features of SOI technology for sensing applications requiring temperatures in excess of the typical bulk silicon junction temperatures of 150^oC. Finally we present the concepts, structures and prototypes of simple and smart micro-hotplate and Infra Red (IR) based emitters for NDIR (Non Dispersive IR) gas sensors in harsh environments.

Keywords

CMOS integrated circuits; silicon-on-insulator; system-in-package; CO₂ capture; IR based emitter; NDIR; SOI sensing technology; automotive; domestic boiler; gas storage; gas transportation; harsh environment; infra red based emitter; microhotplate; nondispersive IR gas sensor; oil storage; oil transportation; sequestration; silicon-on-insulator; small-scale boiler; temperature; temperature 150 C; Boilers; Combustion; Gas detectors; MOSFETs; Temperature measurement; Temperature sensors; CMOS technology for sensing applications; Silicon on Insulator (SOI); System in Package (SiP);

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2012 International

Conference_Location

Sinaia

ISSN

1545-857X

Print_ISBN

978-1-4673-0737-6

Type

conf

DOI

10.1109/SMICND.2012.6400708

Filename

6400708