DocumentCode
2799167
Title
MEMS scanning mirror supported by soft polymeric springs and actuated by electrostatic charge separation
Author
Bachmann, Daniel ; Kühne, Stéphane ; Hierold, Christofer
Author_Institution
ETH Zurich, Zurich
fYear
2007
fDate
21-25 Jan. 2007
Firstpage
723
Lastpage
726
Abstract
We present a novel MEMS scanning mirror featuring soft polymeric suspensions of the mirror plate. The combination of the polymeric suspension and a stiff silicon mirror plate enables large scan angles with a negligible distortion of the mirror plate itself at frequencies up to 1 kHz. Thus, the scan angle per applied actuation voltage is high compared to single material solutions by H. Miyajima et al. (2004). Furthermore, the mirror is actuated by electrostatic charge separation. Therefore, no electrical connection of the mirror is required.
Keywords
micromechanical devices; micromirrors; polymers; MEMS scanning mirror; electrostatic charge separation; soft polymeric spring; soft polymeric suspension; stiff silicon mirror plate; Electrostatics; Fingers; Micromechanical devices; Micromirrors; Mirrors; Polymers; Silicon; Springs; Stators; Suspensions;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location
Hyogo
ISSN
1084-6999
Print_ISBN
978-1-4244-095-5
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2007.4433088
Filename
4433088
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